Turbopumps for PVD, CVD and Etching with Integrated Controllers
Visit www.shimadzu.com/products/industrial/tmp/index.html
for more information and product documentation.
Shimadzu TMP-V2304LM Turbopump
- 1x10^-9 Torr Ultimate Pressure
- 2100 l/s Pumping Speed
- ISO250 F Inlet Flange
Shimadzu TMP-V3304LM Turbopump
- 1x10^-9 Torr Ultimate Pressure
- 3200 l/s N2 Pumping Speed
- ISO320 F Inlet Flange
