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Shimadzu TMP-V2304LM Turbopump

Part Number: TMP-V2304LM


The TMP-V2304LM turbopump is designed for use in PVD, CVD and etching applications. Featuring 5-axis magnetic bearings, variable rotational speed and an integrated controller, the turbo eliminates bulky controller and cable setups. Controls built right on the pump enable manual operation, while RS-485 and RS-232 ports allow remote control. No power supply is required

  • 1x10^-9 Torr
  • 2100 l/s
  • ISO250 F

Details

Description Shimadzu TMP-V2304LM Turbopump
Ultimate Pressure 1x10^-9 Torr
Pumping Speed 2100 l/s
Inlet Flange ISO250 F
Exhaust Flanges KF40 Exhaust
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