Shimadzu TMP-V3304LM Turbopump

The TMP-V3304LM turbopump is designed for use in PVD, CVD and etching applications. Featuring 5-axis magnetic bearings, variable rotational speed and an integrated controller, the turbo eliminates bulky controller and cable setups. Controls built right on the pump enable manual operation, while RS-485 and RS-232 ports allow remote control. No power supply is required

• 1x10^-9 Torr
• 3200 l/s N2
• ISO320 F