Wide-Range Turbos for PVD
Visit www.shimadzu.com/products/industrial/tmp/index.html
for more information and product documentation.
Available in both water and air cooled versions, the Wide-Range xx03M and xx03LM series are designed for use in Physical Vapor Deposition (PVD) applications.
Shimadzu TMP-1003 Series Turbopumps
- 1x10^-11 ... Ultimate Pressure
- 1080 l/s N2 peak Pumping Speed
- 200mm Inlet Flange
Shimadzu TMP-1303 Series Turbopumps
- 1x10^-10 ... Ultimate Pressure
- 1300 l/s N2 peak Pumping Speed
- 200mm Inlet Flange
Shimadzu TMP-1503 Series Turbopumps
- 1x10^-10 ... Ultimate Pressure
- 1500 l/s Pumping Speed
- 250mm Inlet Flange
Shimadzu TMP-203 Series Turbopumps
- 1x10^-10 ... Ultimate Pressure
- 190 l/s N2 peak Pumping Speed
- 100mm Inlet Flange
Shimadzu TMP-303 Series Turbopumps
- 1x10^-10 ... Ultimate Pressure
- 190 l/s N2 peak Pumping Speed
- 100mm Inlet Flange
Shimadzu TMP-3304LM Turbopump
- 1x10^-9 Torr Ultimate Pressure
- 3200 l/s N2 Pumping Speed
- 300mm Inlet Flange
Shimadzu TMP-403 Series Turbopumps
- 1x10^-10 ... Ultimate Pressure
- 420 l/s N2 peak Pumping Speed
- 150mm Inlet Flange
Shimadzu TMP-803 Series Turbopumps
- 1x10^-10 ... Ultimate Pressure
- 800 l/s N2 peak Pumping Speed
- 105mm Inlet Flange
