Shimadzu TMP-3304LM Turbopump

Featuring 5-axis magnetic bearings, fast pumpdown, variable rotational speed, regenerative braking, water cooling and RS-485 network connectivity, the TMP-3304LM turbo is ideal for Physical Vapor Deposition applications. A universal power supply system allows powering from one model of power supply, and in the event of a power failure, the regenerative braking slows the rotor to a safe speed before touching down.

CE, TÜV compliant, NRTL (UL61010A-1), SEMI S2, F47 compliant, SEMI E74 compatible.

• 1x10^-9 Torr
• 3200 l/s N2
• 300mm