Featuring 5-axis magnetic bearings, variable rotational speed, regenerative braking, RS-485 network connectivity and fast pumpdown, the TMP-1503 series turbos are ideal for PVD applications requiring quick chamber evacuation. A universal power supply system allows powering most turbos from one model of power supply, and in the event of a power failure, the regenerative braking slows the rotor to a safe speed before touching down.
CE, TÜV compliant, NRTL (UL61010A-1), SEMI S2, F47 compliant, SEMI E74 compatible.
- 1x10^-10 Torr
- 1500 l/s
- 250mm