Vacuum Aligners
Hine Automation aligners offer a precise and reliable alignment solution for opaque and transparent substrates within high vacuum environments. Ferro fluidic seals, precision DC motors, advanced CCD Array, and sophisticated software are integrated into a state-of-the-art, compact design for semiconductor and compound semiconductor substrates. Although Hine's Aligners are designed to work with Hine Robotic Arms, they may be integrated into systems with a robotic arm able to execute Delta Picks.
Visit www.hineautomation.com for more information and product documentation.
HA-71 Vacuum Aligner
- Up to 300mm ... Wafer Sizes
- Opaque and ... Wafer Types
- 200 or 300mm ... Mounting Facet
HA-75 Vacuum Aligner
- Up to 300mm ... Wafer Sizes
- Opaque and ... Wafer Types
- None Mounting Facet