HA-75 Vacuum Aligner

Part Number: HA-75

Designed to exceed 3 million MCBF, the HA-75 is an integrated aligner and can be integrated into any cluster system featuring a MESC mounting facet. Hines HA-71 provides centering relative to the robotic handler and fiducial orientation for semiconductor and compound semiconductor substrates. Hine Aligners can be integrated with systems having any robotic arm able to execute Delta Picks. The HA-71 is high vacuum compatible, CE/S2 compliant and supports wafer sizes up to 300mm. Class 1 cleanroom compatible. Translucent or opaque wafers. RS-232 / Ethernet control interface.

Up to 300mm wafers*
Opaque and transparent wafers
None

Details

Description	HA-75 Vacuum Aligner
Wafer Sizes	Up to 300mm wafers*
Wafer Types	Opaque and transparent wafers
Mounting Facet	None
Aligner Enclosure Size	Integrated Aligner
Axes of Motion	0 (Theta)
Base Pressure	<5.00e-09 Torr
Leak Rate	1.00e-09 scc He/sec
Input Power	24VDC / 3A
Max Temp	100C
Exposed Materials	6061-T6 Al, 300 and 400 series Stainless, Viton, Borosilicate Glass
Control Interface	RS-232 / Ethernet
MCBF	> 3.00e+06
Repeatability	Theta Axis: 0.02 Deg, Centering: < 0.10mm

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