HA-71 Vacuum Aligner

Part Number: HA-71

Designed to exceed 3 million MCBF, the HA-71 is a facet mounted aligner and can be integrated into any cluster system. Hine

Details

Description	HA-71 Vacuum Aligner
Wafer Sizes	Up to 300mm wafers*
Wafer Types	Opaque and transparent wafers
Mounting Facet	200 or 300mm mounting facet
Aligner Enclosure Size	200 or 300mm
Axes of Motion	0 (Theta)
Base Pressure	<5.00e-09 Torr
Leak Rate	1.00e-09 scc He/sec
Input Power	24VDC / 3A
Max Temp	100C
Exposed Materials	6061-T6 Al, 300 and 400 series Stainless, Viton, Borosilicate Glass
Control Interface	RS-232 / Ethernet
MCBF	> 3.00e+06
Repeatability	Theta Axis: 0.02 Deg, Centering: < 0.10mm