Automated Load Locks
Hine's Star Systems are automated load locks designed to eliminate the need to vent and evacuate the OEMs process chamber prior to every process cycle. The Star Systems offer various levels of functionality and integration that meet technical and budgetary requirements of most OEM applications including Atomic Layer Deposition, Physical Vapor Deposition, Chemical Vapor Deposition, Metal and Oxide Etch, MR Head Deposition, MEMS, and compound semiconductor applications.
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for more information and product documentation.
SL-200 Single Substrate Vacuum Transfer System
- Accomodates ... Wafer Sizes
- 1.5kg max Payload
- 200mm MESC Mounting Facet
SL-300 Single Substrate Vacuum Transfer System
- Accomodates ... Wafer Sizes
- 1.5kg max Payload
- 300mm MESC Mounting Facet
SL-450 Single Substrate Vacuum Transfer System
- Accomodates ... Wafer Sizes
- 5kg max Payload
- 400mm MESC Mounting Facet
