SL-450 Single Substrate Vacuum Transfer System

Part Number: SL-450

The SL-450 handles wafer sizes up to 450mm and is high vacuum compatible. Options include Z-lift for vertical motion, vacuum and gas plumbing and an integrated transfer module. Custom end effectors, CE compliant.

Accomodates wafers 450mm or smaller
5kg max
400mm MESC

Details

Description	SL-450 Single Substrate Vacuum Transfer System
Wafer Sizes	Accomodates wafers 450mm or smaller
Payload	5kg max
Mounting Facet	400mm MESC
Axes of Motion	R, Z
Base Pressure	<5.00e-07 Torr
Leak Rate	1.00e-09 scc He/sec
Input Power	24VDC, 2A
Max Temp	100C
Exposed Materials	6061-T6 Al, Viton, Borosilicate Glass, Crytox, Delrin, PEEK
Control Interface	RS-232 / Ethernet
MCBF	>3.00E+05
Repeatability	R: +/- 0.15mm Z: +/- 0.10mm
Max Reach	635mm
Vertical Stroke	0.5 deg

Username
Password
Create an account*
*required for checkout