SL-200 Single Substrate Vacuum Transfer System

Part Number: SL-200

The SL-200 handles wafer sizes up to 200mm and is high vacuum compatible. Custom end effectors, CE compliant. Options include Z-lift for vertical motion, vacuum and gas plumbing and an integrated transfer module.

Accomodates wafers 200mm or smaller
1.5kg max
200mm MESC

Details

Description	SL-200 Single Substrate Vacuum Transfer System
Wafer Sizes	Accomodates wafers 200mm or smaller
Payload	1.5kg max
Mounting Facet	200mm MESC
Axes of Motion	R, Z
Base Pressure	5.00e-07 Torr
Leak Rate	1.00e-09 scc He/sec
Input Power	24VDC, 2A
Max Temp	100C
Exposed Materials	6061-T6 Al, Viton, Borosilicate Glass, Crytox, Delrin, PEEK
Control Interface	RS-232 / Ethernet
MCBF	>3.00E+05
Repeatability	R: +/- 0.15mm Z: +/- 0.10mm
Max Reach	305mm
Vertical Stroke	0.5 deg

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