Coated Wide-Range Turbopumps for Ion Implantation, CVD and Etching
Visit www.shimadzu.com/products/industrial/tmp/index.html
for more information and product documentation.
Shimadzu TMP-1003LMC Turbopump
- 1x10^-10 ... Ultimate Pressure
- 1080 l/s N2 peak Pumping Speed
- ISO200 F, CF1000 Inlet Flange
Shimadzu TMP-203LMC Turbopump
- 1x10^-9 Torr Ultimate Pressure
- 190 l/s N2 peak Pumping Speed
- ISO100 F/K, CF600 Inlet Flange
Shimadzu TMP-303LMC Turbopump
- 1x10^-9 Torr Ultimate Pressure
- 320 l/s N2 peak Pumping Speed
- ISO100 F/K, CF600 Inlet Flange
Shimadzu TMP-403LMC Turbopump
- 1x10^-9 Torr Ultimate Pressure
- 420 l/s N2 peak Pumping Speed
- ISO160 F/K, CF800 Inlet Flange
Shimadzu TMP-803LMC Turbopump
- 1x10^-10 ... Ultimate Pressure
- 800 l/s N2 peak Pumping Speed
- ISO160 F, CF800 Inlet Flange
