Shimadzu TMP-203LMC Turbopump

Featuring 5-axis magnetic bearings, variable rotational speed and a hard chemical coating, the TMP-203LMC turbos are ideal for ion implantation, CVD and etching applications. A universal power supply system allows powering most turbos from one model of power supply, and in the event of a power failure, the regenerative braking slows the rotor to a safe speed before touching down.

CE, TÜV compliant, NRTL (UL61010A-1), SEMI S2, F47 compliant, SEMI E74 compatible.

• 1x10^-9 Torr
• 190 l/s N2 peak
• ISO100 F/K, CF600