High-throughput Turbopumps for CVD, Etching
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for more information and product documentation.
Shimadzu TMP-2804 Series Turbopumps
- 1x10^-9 Torr Ultimate Pressure
- 2800 l/s N2 Pumping Speed
- 250mm Inlet Flange
Shimadzu TMP-3304 Series Turbopumps
- 1x10^-9 Torr Ultimate Pressure
- 3200 l/s N2 Pumping Speed
- 300mm Inlet Flange
Shimadzu TMP-4304 Series Turbopumps
- 1x10^-9 Torr Ultimate Pressure
- 4400 l/s N2 Pumping Speed
- 350mm/400mm Inlet Flange
