Shimadzu TMP-2804 Series Turbopumps

With a 2800l/s pumping speed, the TMP-2804 series turbos are ideal for CVD and Etching applications requiring fast pumpdown times. A universal power supply system allows powering most turbos from one model of power supply, and in the event of a power failure, the regenerative braking slows the rotor to a safe speed before touching down. Additional features include 5-axis magnetic bearings to allow the TMP series to be mounted in any orientation, variable rotational speed to assist in tuning the pump's exhaust performance, and RS-485 network connectivity for remote control.

CE, TÜV compliant, NRTL (UL61010A-1), SEMI S2, F47 compliant, SEMI E74 compatible.

• 1x10^-9 Torr
• 2800 l/s N2
• 250mm