Vacuum Robotic Arms
Designed as the central handling robot for the Constellation Systems, Hine Vacuum Robotic Arms can be integrated with any vacuum transfer systems. The HA-3.0 is the perfect fit for budget sensitive projects where no vertical travel is required. When substrate transfer with verified precision and repeatability within high vacuum environments is required, Hine HA-5.0 Vacuum Robotic Arm is the best solution.
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HA-3.0 Vacuum Robotic Arm
- Up to 300mm ... Wafer Sizes
- 1.5kg max payload Payload
- Top ... Mounting Configuration
HA-5.0 Vacuum Robotic Arm
- Up to 300mm ... Wafer Sizes
- 4.5kg max payload Payload
- Top ... Mounting Configuration
