HA-5.0 Vacuum Robotic Arm

The Hine Automation HA-5.0 is designed for high reliability, with greater than 3 million MCBF. Features include 2-axis motion control and a payload capacity of up to 4.5Kg. Both standard and custom size arm segments are available, as well as standard or custom end effectors (single or dual). Compact design including integrated controller and RS-232 / Ethernet control interface.

HA-5.0 is the best replacement available for the Hine Design 4.5V. High vacuum compatible. CE/S2 compliant. Class 1 cleanroom compatible.

* Hine offers end effectors for SEMI standard sizes up to 300mm, others are available on request. Payload depends on end effector. Higher payloads available on request.

• Up to 300mm wafers*
• 4.5kg max payload
• Top Mounted