Atmospheric Robotic Arms
Hine atmospheric robots are high-performance substrate handling solutions for semiconductor applications. These SCARA type robots provide reliable and clean transfer mechanism for atmospheric front ends. Hine atmospheric robots transfer a wide variety of substrates including SEMI standard wafers, reticles and masks.
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Hine Automation HAtm-5.0 Atmospheric Robotic Arm
- SEMI standard up ... Wafer Sizes
- 0.5kg max payload Payload
- R,Z,0 (Theta) ... Axes of Motion