The HAtm-5.0 features a high reliability design rated to over 10 million MCBF, and has full 3-axis motion control. It supports a standard payload up to 0.5kg, with additional weight available on request. Standard and custom size arm segments, atandard and custom end effectors for SEMI standard wafers and custom substrates are available. Compact design including integrated controller, RS-232 / Ethernet control interface. We consider this to be the best replacement for the Zbot.
Options include vacuum chuck and edge gripper end effectors, a wafer mapping sensor, single or dual end effector blades, custom vertical strokes, tracking mounting and custom payloads.
* Hine offers end effectors for SEMI standard sizes up to 200mm, others are available on request. Payload depends on end effector. Higher payloads available on request.
- SEMI standard up to 200mm*
- 0.5kg max payload
- R,Z,0 (Theta) Axes
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