Cassette-to-Cassette Vacuum Transfer Systems
Hine's Constellation-series Cassette-To-Cassette Vacuum Transfer Systems integrate the reliability of Hine Vacuum Robotics and the latest system integration technology into a functional design with a small system footprint. The Constellation System can be customized to many process applications including Atomic Layer Deposition, Physical Vapor Deposition, Chemical Vapor Deposition, Metal and Oxide Etch, MR Head Deposition, MEMS, and compound semiconductor applications.
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HA-200 Constellation Cassette-To-Cassette Vacuum Transfer System
- Up to 200mm wafers Wafer Sizes
- 4 Sides Sides
- 1 Load ... Cassette Load Locks
HA-400 Constellation Cassette-To-Cassette Vacuum Transfer System
- Up to 200mm wafers Wafer Sizes
- 4 Sides Sides
- 1 Load ... Cassette Load Locks
HA-600 Constellation Cassette-To-Cassette Vacuum Transfer System
- Up to 200mm wafers Wafer Sizes
- 6 Sides Sides
- 2 Load ... Cassette Load Locks
HA-800 Constellation Cassette-To-Cassette Vacuum Transfer System
- Up to 200mm wafers Wafer Sizes
- 8 Sides Sides
- 2 Load ... Cassette Load Locks
