HA-200 Constellation Cassette-To-Cassette Vacuum Transfer System

Part Number: HA-200

Sophisticated automation features including wafer mapping and wafer cross-slot detection. The HA-200 features safety interlocks, high vacuum compatibility, CE/S2 compliancy, and RS-232 / Ethernet control interfaces.

Hine Robotics: HA-5.0 Robotic Arm and HA-50V Vacuum Elevator
High reliability of > 3 million MCBF

Options:

Optical aligner
SEMI standard and custom end effectors
Dual/Single end effector
25 or 50 wafer cassettes

Standard Features:

Up to 200mm wafers
4 Sides
1 Load Lock

Details

Description	HA-200 Constellation Cassette-To-Cassette Vacuum Transfer System
Wafer Sizes	Up to 200mm wafers
Sides	4 Sides
Cassette Load Locks	1 Load Lock
Transfer Height	1100mm
Wafers per Cassette	25 (custom wafer cassettes available)
Base Pressure	<5.00e-07 Torr
Leak Rate	5.00e-09 scc He/sec
Input Power	208VAC 20A (Single-phase)
Max Temp	100C
MCBF	>3.00E+06
MTTR	<2 hours
Exposed Materials	6061-T6 Al, 300-400 series Stainless, Viton, Borosilicate Glass
Interface	200mm MESC (no valve between cassette load port and transfer module)
Control Interface	RS-232 / Ethernet

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