Coated High-Throughput Turbopumps for Etching
Visit www.shimadzu.com/products/industrial/tmp/index.html
for more information and product documentation.
Shimadzu TMP-1003LMTC Series Turbopumps
- 1x10^-10 ... Ultimate Pressure
- 1080 l/s N2 peak Pumping Speed
- 200mm Inlet Flange
Shimadzu TMP-1303LMTC Series Turbopumps
- 1x10^-9 Torr Ultimate Pressure
- 1300 l/s N2 peak Pumping Speed
- 200mm Inlet Flange
Shimadzu TMP-203LMTC Turbopump
- 1x10^-9 Torr Ultimate Pressure
- 190 l/s N2 Pumping Speed
- 100mm Inlet Flange
Shimadzu TMP-2203 Series Turbopumps
- 1x10^-9 Torr Ultimate Pressure
- 2140 l/s N2 peak Pumping Speed
- 250mm Inlet Flange
Shimadzu TMP-2804LMTC Series Turbopumps
- 1x10^-9 Torr Ultimate Pressure
- 2800 l/s N2 peak Pumping Speed
- 250mm Inlet Flange
Shimadzu TMP-303LMTC Turbopump
- 1x10^-9 Torr Ultimate Pressure
- 320 l/s N2 Pumping Speed
- 100mm Inlet Flange
Shimadzu TMP-3304LMTC Turbopump
- 1x10^-9 Torr Ultimate Pressure
- 3200 l/s N2 Pumping Speed
- 300mm Inlet Flange
Shimadzu TMP-403LMTC Turbopump
- 1x10^-9 Torr Ultimate Pressure
- 420 l/s N2 peak Pumping Speed
- 150mm Inlet Flange
Shimadzu TMP-4304LMTC Turbopump
- 1x10^-9 Torr Ultimate Pressure
- 4400 l/s N2 Pumping Speed
- 350mm/400mm Inlet Flange
Shimadzu TMP-803LMTC Series Turbopumps
- 1x10^-10 ... Ultimate Pressure
- 800 l/s N2 peak Pumping Speed
- 150mm Inlet Flange
