Cryopump Compressors
Sumitomo HC-4E1 Water-Cooled Compressor
- 2.7L/min, 4-27C Water Cooling
- 200,230/240V, 50 ... AC Supply
- 2.6kW at 5... Power Consumption
Sumitomo HC-8E4 Water-Cooled Compressor
- 5.7-5.9 L/min, 4-21C ... Cooling
- 220V 50Hz, 2... AC Supply
- 3.7kW at 5... Power Consumption
Sumitomo F-70L/H Water-Cooled Compressor
- 6-9 L/min, 5-25C Water Cooling
- 200V, 50/60Hz (LV) ... AC Supply
- 6.6-6.9kW ... Power Consumption
Zephyr Air-Cooled Compressor
- 20m^3/min (706cfm) Air Cooling
- 3.0kW at 50 Hz, ... AC Supply
- 200-2... Power Consumption
