Shimadzu TMP-1103LMP Turbopump

Featuring 5-axis magnetic bearings, variable rotational speed and a H2 compression ratio of 10^6, the TMP-1103LMP turbo is ideal for pumping on light gases and reaching UHV range. A universal power supply system allows powering most turbos from one model of power supply, and in the event of a power failure, the regenerative braking slows the rotor to a safe speed before touching down.

CE, TÜV compliant, NRTL (UL61010A-1), SEMI S2, F47 compliant, SEMI E74 compatible.

• 1x10^-11 Torr
• 1080 l/s N2 peak
• ISO200 F, CF1000