Hine Automation HAtm-5.0V Atmospheric Elevator

The HAtm-5.0V features a high reliability design rated to over 3 million MCBF, and supports a maximum payload of up to 34kg. A compact design with integrated controller avoids wasting space, and an integrated RS-232 / Ethernet control interface is standard. CE/S2 compliant, Class 1 cleanroom compatible. 185mm and 305mm strokes.

*Head plates for SEMI standard wafer sizes available. Custom substrate sizes available on request.

• User defined wafer sizes*
• 34kg max payload
• Bottom mounted