HA-50V Vacuum Elevator

Hine Automation's Vacuum Elevators are the next generation Random Access Vacuum Elevators. The HA-50V can be integrated into any cassette load port or process module requiring vertical motion. The high reliability design of more than 3 million MCBF ensures minimal downtime, and the compact design ensures no space is wasted. Rated for a payload of up to 34kg, higher payloads are available on request.

Integral controller and RS-232 / Ethernet interface. CE/S2 compliant and high vacuum compatible. Class 1 cleanroom compatible. Plug and Play upgrades for the Hine Design 48V and EMS 1248V elevator models.

• User defined wafer sizes*
• 34kg max payload
• Bottom mounted